An accurate measuring method for the internal jaw stiffness of deformable silicon arms

The internal jaw stiffness of the silicon arm and its uniformity directly determine geometric position clamped part, which in turn affects accuracy fusion target ball. slight variation caused by machining errors is a crucial factor affecting micro-target. To accurately detect errors, this paper proposes multi-point detection method combining micro-feed force application high-precision image inspection. An experimental measurement device also built to measure sample. proposed method, can obtain micro-deformation data jaws under small loads fit stiffness, provides new way tiny, thin-walled, brittle cantilever beam structures.